This course will cover the state-of-the-art processes currently used for the fabrication of microelectronic and nanoelectronic devices. Students will demonstrate the function of various transistors and how they operate in a circuit to formlogic gates. Properties of semiconductor materials will be explored. Students will learn to qualify and use semiconductor process equipment, inspect devices using atomic force andscanning electron microscopes and perform electrical measurements on semiconductor devices. Use of clean room chemicalsfor processing semiconductor materials will be considered. Prerequisite(s): 635-101 Intro to Microfabrication. Restricted to students admitted to the following program(s): 10-635-1 Nanoscience Technology.
