Course Description for: 635-108 Micro and Nano Fabrication

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Students will learn atomic structure and the periodic table, particularly as related to semiconductors; the meaning of semiconductor materials, their functions and use; differences between single crystal and polycrystalline materials; operations of diffusion and thin film deposition and how photolithography and masking work in the semiconductor process; oxidation process; etching, including wet and dry etching and photoresist stripping; doping, including diffusion techniques and ion implantation; thin film deposition, including CVD, LPCVD and metallization methods; wafer terminology, testing, evaluation, and yield factors. Prerequisite(s): 635-103 Nanoelectronics and 635-104 Nano Cell Biology 2 and 635-105 Nanomaterials. Co-requisite(s): 635-112 Micro & Nano Fabrication Lab.

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