Course Description for: 635-119 MEMS and Microfluidics

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Micro-Electro-Mechanical Systems (MEMS) are microscopic moving devices manufactured using computer chip fabrication methods. They have a wide variety of applications including in air bag collision sensors, digital projectors, optical communications, chemical sensors. Students will continue their experience in microfabrication and microelectronics manufacturing to design and manufacture MEMS in the cleanroom. Prerequisite(s): 635-108 Micro and Nano Fabrication and 635-112 Micro & Nano Fabrication Lab. Co-requisite(s): 635-121 MEMS & Microfluidics Desig. Restricted to students admitted to the following program(s): 10-635-1 Nanoscience Technology.

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