Facilities of the Nanoscience Program

Class 100 Cleanroom

• Contact aligner
• Oxidation furnace
• Wet benches
• Spin coater
• RF sputter system
• Parametric analyzer
• Optical microscope
• Linewidth measurement system
• Surface profiler
• Ellipsometer
• Optical thin film measurement system
• 4-point probe
• Plasma etcher
• PECVD system

Nanoscience Laboratory

• Scanning Electron Microscope
• Energy Dispersive X-ray Spectroscopy (EDS) Genesis 2000 XMS
• Scanning Probe Microscope Veeco CPII

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