Facilities of the Nanoscience Department

Nanoscience Laboratory

• Scanning Electron Microscope (SEM) JEOL 6060LV
  • 3.5 nm resolution
  • Magnification 5X-300,000X
  • Motor driven stage
• Energy Dispersive X-ray Spectroscopy (EDS) Genesis 2000 XMS
• Scanning Probe Microscope Veeco CPII
  • On-axis view must have magnification to give feature resolution of 1 to 2 microns
  • Following modes: Contact, Lateral Force Microscopy (LFM), Tapping Mode, Phase Imaging, and Scanning Tunneling Microscopy (STM)
• Class 100 Cleanroom
  • Contact aligner
  • Oxidation furnace
  • Wet benches
  • Spin coater
  • RF sputter system
  • Parametric analyzer
  • Optical microscope
  • Linewidth measurement system
  • Surface profiler
  • Ellipsometer
  • Optical thin film measurement system
  • 4-point probe
  • Plasma etcher
  • PECVD system

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